GF100 系列金属密封热质量流量计 | 北京北方大河仪器仪表有限公司

型号 GF100 / GF101 / GF120 / GF120XSL / GF120XSL / GF121高纯度流路。GF100 系列金属密封质量流量控制器和仪表性能：快速响应和可重现的高纯度/纯度过程气体输送。专为半导体、MOCVD 等其他气体流量控制应用设计，GF100 系列可确保测量结果可重现并且长时间使用后性能依然高度稳定。一台采用标准 MultiFlo™ 技术的 MFC 即可满足数千种气体类型和各种量程组合的需求，无需从气路上拆除 MFC 并且不影响精度。结果：提高工艺灵活性和效率辅以业内高纯度的过程气体，有助于提高产率和生产效率。

型号	GF100	GF101	GF120	GF120XSL	GF120XSL	GF121
区别	High Purity	High Purity High Flow Rate	Ultra-High Purity Ultra-Fast Response Time	SDS Gas Delivery	SDS Gas Delivery	Ultra-High Purity High Flow Rate
流量范围-满量程容量	3 sccm – 55 slm	55 slm – 300 slm	3 sccm – 55 slm	>25 sccm – 1 slm	4 – 25 sccm	55 slm – 300 slm
表面抛光	10µ inch Ra	10µ inch Ra	4µ inch Ra	4µ inch Ra	4µ inch Ra	4µ inch Ra
精度	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%
重复性	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.
响应时间-常闭	Normally Closed <1 sec	Normally Closed <1 sec	Normally Closed 700 ms	Normally Closed <3 sec	Normally Closed <3 sec	Normally Closed <1 sec
响应时间-常开	Normally Open <1.5 sec	Normally Open —	Normally Open <1.5 sec	Normally Open —	Normally Open —	Normally Open —
多气体多量程	MultiFlo™ Standard	MultiFlo™ Standard	MultiFlo™ Standard	—	—	MultiFlo™ Standard
瞬时压力波动不敏感	—	—	—	—	—	—
诊断能力	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption
模拟通讯	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc
数字通讯	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™

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